Onto Innovation annual capital expenditures (capex)
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Onto Innovation Capital Expenditures (CapEx) Growth & History (ONTO)
Onto Innovation's capital expenditures (capex) was $28.5M for fiscal 2025.
View full Onto Innovation company overviewOnto Innovation annual capital expenditures (capex) history
| Fiscal year | Period ended | Capital expenditures (CapEx) | Change | Growth |
|---|---|---|---|---|
| 2025 | 2026-01-03 | $28.5M | −$3.4M | −10.63% |
| 2024 | 2024-12-28 | $31.9M | $9.3M | +41.33% |
| 2023 | 2023-12-30 | $22.6M | $4.2M | +22.65% |
| 2022 | 2022-12-31 | $18.4M | $6.4M | +52.88% |
| 2021 | 2022-01-01 | $12.0M | $8.2M | +214.42% |
| 2020 | 2020-12-26 | $3.8M | −$3.0M | −43.71% |
| 2019 | 2019-12-31 | $6.8M | −$740,000 | −9.81% |
| 2018 | 2018-12-31 | $7.5M | −$2.7M | −26.13% |
| 2017 | 2017-12-31 | $10.2M | $6.2M | +155.31% |
| 2016 | 2016-12-31 | $4.0M | $2.2M | +116.63% |
| 2015 | 2015-12-26 | $1.8M | −$3.9M | −68.13% |
| 2014 | 2014-12-27 | $5.8M | $103,000 | +1.81% |
| 2013 | 2013-12-28 | $5.7M | $699,000 | +14.01% |
| 2012 | 2012-12-29 | $5.0M | $2.2M | +81.13% |
| 2011 | 2011-12-31 | $2.8M | −$341,000 | −11.01% |
| 2010 | 2011-01-01 | $3.1M | $2.3M | +276.64% |
| 2009 | 2010-01-02 | $822,000 | — | — |
Onto Innovation quarterly capital expenditures (capex)
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Q1.11
Q2.11
Q3.11
Q4.11
Q1.12
Q2.12
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Q4.12
Q1.13
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Q4.13
Q1.14
Q2.14
Q3.14
Q4.14
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Q3.15
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Q3.16
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Q1.17
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Q4.17
Q1.18
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Q1.19
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Q1.21
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Q2.23
Q3.23
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Q1.24
Q2.24
Q3.24
Q4.24
Q1.25
Q2.25
Q3.25
Q4.25
Q1.26
Q2.26
| Fiscal quarter | Period ended | Capital expenditures (CapEx) | Change | YoY change |
|---|---|---|---|---|
| Q2 2026 | 2026-06-30 | $3.7M | −$10.1M | −73.45% |
| Q1 2026 | 2026-03-31 | $3.6M | −$4.6M | −56.46% |
| Q4 2025 | 2026-01-03 | $5.1M | $503,000 | +10.87% |
| Q3 2025 | 2025-09-27 | $1.4M | −$6.7M | −82.87% |
| Q2 2025 | 2025-06-28 | $13.8M | $1.5M | +12.40% |
| Q1 2025 | 2025-03-29 | $8.2M | $1.3M | +18.04% |
| Q4 2024 | 2024-12-28 | $4.6M | $2.2M | +87.82% |
| Q3 2024 | 2024-09-28 | $8.0M | $402,000 | +5.26% |
| Q2 2024 | 2024-06-29 | $12.3M | $7.6M | +165.91% |
| Q1 2024 | 2024-03-30 | $7.0M | −$880,000 | −11.20% |
| Q4 2023 | 2023-12-30 | $2.5M | −$6.2M | −71.42% |
| Q3 2023 | 2023-09-30 | $7.6M | $4.8M | +165.15% |
| Q2 2023 | 2023-07-01 | $4.6M | $200,000 | +4.54% |
| Q1 2023 | 2023-04-01 | $7.9M | $5.4M | +214.96% |
| Q4 2022 | 2022-12-31 | $8.6M | $7.8M | +898.73% |
| Q3 2022 | 2022-10-01 | $2.9M | $1.3M | +78.24% |
| Q2 2022 | 2022-07-02 | $4.4M | −$1.3M | −22.44% |
| Q1 2022 | 2022-04-02 | $2.5M | −$1.4M | −35.64% |
| Q4 2021 | 2022-01-01 | $863,000 | $425,000 | +97.03% |
| Q3 2021 | 2021-09-25 | $1.6M | $836,000 | +106.91% |
| Q2 2021 | 2021-06-26 | $5.7M | $4.1M | +252.54% |
| Q1 2021 | 2021-03-27 | $3.9M | $2.9M | +288.67% |
| Q4 2020 | 2020-12-26 | $438,000 | — | — |
| Q3 2020 | 2020-09-26 | $782,000 | — | — |
| Q2 2020 | 2020-06-27 | $1.6M | — | — |
| Q1 2020 | 2020-03-28 | $997,000 | — | — |
| Q3 2019 · Sep 30 | 2019-09-30 | $1.5M | $366,000 | +30.99% |
| Q3 2019 · Sep 28 | 2019-09-28 | $1.6M | $448,000 | +37.93% |
| Q2 2019 · Jun 30 | 2019-06-30 | $1.3M | $892,000 | +201.81% |
| Q2 2019 · Jun 29 | 2019-06-29 | $4.2M | $3.7M | +846.15% |
| Q1 2019 · Mar 31 | 2019-03-31 | $1.3M | $1,000 | +0.08% |
| Q1 2019 · Mar 30 | 2019-03-30 | $4.1M | $2.8M | +213.27% |
| Q4 2018 | 2018-12-31 | $4.6M | −$3.3M | −41.54% |
| Q3 2018 | 2018-09-29 | $1.2M | $375,000 | +46.53% |
| Q2 2018 | 2018-06-30 | $442,000 | −$1.0M | −70.32% |
| Q1 2018 | 2018-03-31 | $1.3M | $1.3M | +2706.38% |
| Q4 2017 | 2017-12-31 | $7.9M | $7.2M | +1110.46% |
| Q3 2017 | 2017-09-30 | $806,000 | −$15,000 | −1.83% |
| Q2 2017 | 2017-07-01 | $1.5M | −$429,000 | −22.37% |
| Q1 2017 | 2017-04-01 | $47,000 | −$563,000 | −92.30% |
| Q4 2016 | 2016-12-31 | $650,000 | $169,000 | +35.14% |
| Q3 2016 | 2016-09-24 | $821,000 | $499,000 | +154.97% |
| Q2 2016 | 2016-06-25 | $1.9M | $1.4M | +254.53% |
| Q1 2016 | 2016-03-26 | $610,000 | $108,000 | +21.51% |
| Q4 2015 | 2015-12-26 | $481,000 | −$2.5M | −83.92% |
| Q3 2015 | 2015-09-26 | $322,000 | −$691,000 | −68.21% |
| Q2 2015 | 2015-06-27 | $541,000 | −$1.1M | −66.60% |
| Q1 2015 | 2015-03-28 | $502,000 | −$1.7M | −77.11% |
| Q4 2014 | 2014-12-27 | $3.0M | $819,000 | +37.69% |
| Q3 2014 | 2014-09-27 | $1.0M | −$533,000 | −34.48% |
| Q2 2014 | 2014-06-28 | $1.6M | $647,000 | +66.50% |
| Q1 2014 | 2014-03-29 | $2.2M | $1.2M | +119.96% |
| Q4 2013 | 2013-12-28 | $2.2M | $888,000 | +69.11% |
| Q3 2013 | 2013-09-28 | $1.5M | $476,000 | +44.49% |
| Q2 2013 | 2013-06-29 | $973,000 | −$795,000 | −44.97% |
| Q1 2013 | 2013-03-30 | $997,000 | $130,000 | +14.99% |
| Q4 2012 | 2012-12-29 | $1.3M | $612,000 | +90.94% |
| Q3 2012 | 2012-09-29 | $1.1M | $734,000 | +218.45% |
| Q2 2012 | 2012-06-30 | $1.8M | $777,000 | +78.41% |
| Q1 2012 | 2012-03-31 | $867,000 | $112,000 | +14.83% |
| Q4 2011 | 2011-12-31 | $673,000 | — | — |
| Q3 2011 | 2011-10-01 | $336,000 | −$926,000 | −73.38% |
| Q2 2011 | 2011-07-02 | $991,000 | — | — |
| Q1 2011 | 2011-04-02 | $755,000 | — | — |
| Q3 2010 | 2010-10-02 | $1.3M | — | — |
Onto Innovation capital expenditures (capex) trends
Over the last five fiscal years, Onto Innovation's capital expenditures (capex) increased from $3.8M to $28.5M, a change of $24.7M. The latest reported quarter, Q2 2026, shows $3.7M.
About the metric
What capital expenditures (CapEx) mean
Capital expenditures, commonly called CapEx, are cash investments in long-lived assets such as property, plants, equipment, infrastructure, and productive software. CapEx can support future growth or maintain existing operations, but it reduces current-period free cash flow.
Calculation and source
SEC-reported capital expenditures
TickerStat standardizes cash payments for property, plant, equipment, and other productive assets reported in company SEC filings. When a filer reports separate qualifying CapEx components instead of a total, those components are combined for the same fiscal period. Fiscal periods can differ from calendar years, so exact period-end dates are included.
Review Onto Innovation source filings ↗