Onto Innovation Free Cash Flow (FCF) History (ONTO)

Onto Innovation reported $299.8M in free cash flow for fiscal 2025, an increase of 40.24% from the previous fiscal year, with a free cash flow margin of 29.82%.

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Onto Innovation free cash flow by year

Onto Innovation annual free cash flow

Fiscal yearPeriod endedFree cash flowChangeGrowthFCF margin
20252026-01-03$299.8M$86.0M+40.24%+29.82%
20242024-12-28$213.8M$64.4M+43.09%+21.65%
20232023-12-30$149.4M$31.1M+26.29%+18.31%
20222022-12-31$118.3M−$44.9M−27.53%+11.77%
20212022-01-01$163.2M$61.1M+59.80%+20.69%
20202020-12-26$102.2M$90.8M+800.52%+18.36%
20192019-12-31$11.3M−$84.5M−88.16%+3.71%
20182018-12-29$95.8M$80.5M+522.44%+29.54%
20172017-12-30$15.4M−$26.3M−63.06%+5.95%
20162016-12-31$41.7M$42.0M+18.85%
20152015-12-26−$275,000$6.2M−0.15%
20142014-12-27−$6.4M$1.7M−3.86%
20132013-12-28−$8.1M−$27.1M−5.63%
20122012-12-29$19.0M−$32.3M−62.91%+10.40%
20112011-12-31$51.3M$26.7M+109.01%+22.29%
20102011-01-01$24.5M$31.1M+13.04%
20092010-01-02−$6.6M−8.57%

Onto Innovation free cash flow growth trends

Over the last five reported fiscal years, free cash flow grew from $102.2M to $299.8M, a compound annual growth rate of 24.03%. Onto Innovation's latest reported quarter, Q2 2026, generated $57.9M in free cash flow, an increase of 30.97% year over year.

About the metric

What free cash flow means

Free cash flow is the cash a company generates from operations after capital expenditures. Positive FCF can fund dividends, buybacks, debt repayment, or reinvestment; negative FCF means capital spending exceeded operating cash flow for that period.

Calculation and source

How free cash flow is calculated

TickerStat calculates free cash flow as SEC-reported operating cash flow minus capital expenditures. FCF margin equals free cash flow divided by revenue. Fiscal periods can differ from calendar years, so the tables include exact period-end dates.

Review Onto Innovation filings at SEC.gov ↗